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Layout patterning check for DFM

Author(s):
  • C. C. Chang ( Taiwan Semiconductor Manufacturing Co. Ltd., Taiwan )
  • I. C. Shih ( Taiwan Semiconductor Manufacturing Co. Ltd., Taiwan )
  • J. F. Lin ( Taiwan Semiconductor Manufacturing Co. Ltd., Taiwan )
  • Y. S. Yen ( Taiwan Semiconductor Manufacturing Co. Ltd., Taiwan )
  • C. M. Lai ( Taiwan Semiconductor Manufacturing Co. Ltd., Taiwan )
Publication title:
Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6925
Pub. Year:
2008
Page(from):
69251R-1
Page(to):
69251R-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471109 [0819471100]
Language:
English
Call no.:
P63600/6925
Type:
Conference Proceedings

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