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Rules based process window OPC

Author(s):
Publication title:
Design for manufacturability through design-process integration II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6925
Pub. date:
2008
Page(from):
69251C-1
Page(to):
69251C-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471109 [0819471100]
Language:
English
Call no.:
P63600/6925
Type:
Conference Proceedings

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