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DFM application on dual tone sub 50nm device

Author(s):
  • B.-S. Nam ( Hynix Semiconductor, Inc., South Korea )
  • J. Moon ( Hynix Semiconductor, Inc., South Korea )
  • J.-H. Jeong ( Hynix Semiconductor, Inc., South Korea )
  • D.-H. Kong ( Hynix Semiconductor, Inc., South Korea )
  • S. Oh ( Hynix Semiconductor, Inc., South Korea )
Publication title:
Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6925
Pub. Year:
2008
Page(from):
692514-1
Page(to):
692514-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471109 [0819471100]
Language:
English
Call no.:
P63600/6925
Type:
Conference Proceedings

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