A procedure to back-annotate process induced layout dimension changes into the post layout simulation netlist

A procedure to back-annotate process induced layout dimension changes into the post layout simulation netlist

Author(s):

J. Ho ( Xilinx, Inc., USA )
Y. Wang ( Xilinx, Inc., USA )
X. Wu ( Xilinx, Inc., USA )
J. Soward ( Xilinx, Inc., USA )
P. Zhang ( Anchor Semiconductor, Inc., USA )

Publication title:

Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6925

Pub. Year:

2008

Page(from):

69250V-1

Page(to):

69250V-9

Pages:

9

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819471109 [0819471100]

Language:

English

Call no.:

P63600/6925

Type:

Conference Proceedings

Details

TDL ID:	ZA00052556
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Design for Manufacturability through Design-Process Integration
Conf. info. (Number):	2008 : 2nd
Conf. info. (Venue):	San Jose, California, USA
Conf. info. (Date):	2008.02.28-2008.02.29
Note for article:	Design for manufacturability through design-process integration II, 28-29 February 2008, San Jose, California, USA. Poster Session, 69250V, 6925-29

Similar Items:

1 Conference Proceedings DFM: a practical layout optimization procedure for the improved process window for an existing 90-nm product [6156-11] Ho, J., Wang, Y., Hou, Y.-C., Lin, B. S.-M., Yu, C. C., Wu, K., Ma, C. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Changes of soil characteristics in process of land desertification Wang, L., Zhang, Y., Zhang, H., Xu, J., Li, X. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Simulation of Melting Infiltration Process of Phase Change Material in Fiber Porous Ceramic P. Li, L.K. Zeng, B. Wu, X.S. Cheng, H. Wang Trans Tech Publications	8 Conference Proceedings The simulation research on hyperthermia temperature of the bladder tumor controlled by grey forecasting J. Wu, J. Zhu, Z. Wang, X. Zhang Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings SOG etch-back process induced surface roughness Chu,P.-T., Chen,S.-F., Wu,J.-S., Hung,C.-C., Lin,T.-H., Chao,Y.-C. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Microstructure and Mechanical Properties of Ultra-Fine Grain AZ80 Alloy Processed by Back Pressure Equal Channel Angular Pressing N.X. Zhang, H. Ding, J.Z. Li, X.L. Wu, Y.L. Li Trans Tech Publications
4 Conference Proceedings Two-dimensional layout computer-aided system Dai,T., Cao,J., Zhang,X. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Three-dimensional simulation of micropumps Xu,Y., Kong,Y.P., Zhang,X.X., Yao,K., Choong,W.O., Tay,F.E.H., Wang,W.P. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Annotated layout optimization [6156-05] Thiele, J., Kahle, R. SPIE - The International Society of Optical Engineering	11 Conference Proceedings Three-dimensional thermal analysis for laser assisted machining of ceramics using FEA X. Wu, H. Zhang, Y. Wang Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Electron-Irradiation-Induced Changes of Martensitic Transformation Characteristics in TiNi Shape Memory Alloys Zu, X.T., You, L.P., Zhu, S., Wang, Z.G., Wu, J.H., Wang, L.M. Materials Research Society	12 Conference Proceedings FPGA chip performance improvement with gate shrink through alternating PSM 9Onm process [5992-182] Yu, C. -C., Shieh, M. -F., Liu, E., Lin, B., Ho, J., Wu, X., Panaite, P., Chacko, M., Zhang, Y., Lei, W. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12