A simulation study on the impact of lithographic process variations on CMOS device performance
- Author(s):
- T. Fühner ( Fraunhofer Institute of Integrated Systems and Device Technology, Germany )
- C. Kampen ( Fraunhofer Institute of Integrated Systems and Device Technology, Germany )
- I. Kodrasi ( Jacobs Univ., Germany )
- A. Burenkov ( Fraunhofer Institute of Integrated Systems and Device Technology, Germany )
- A. Erdmann ( Fraunhofer Institute of Integrated Systems and Device Technology, Germany )
- Publication title:
- Optical Microlithography XXI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6924
- Pub. Year:
- 2008
- Vol.:
- 3
- Page(from):
- 692453-1
- Page(to):
- 692453-12
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819471093 [0819471097]
- Language:
- English
- Call no.:
- P63600/6924
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Efficient optimization of lithographic process conditions using a distributed combined global/local search approach [6154-146]
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Rigorous electromagnetic field simulation of two-beam interference exposures for the exploration of double patterning and double exposure scenarios
Society of Photo-optical Instrumentation Engineers |
2
Conference Proceedings
Genetic algorithms for geometry optimization in lithographic imaging systems
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Physically based simulation of fully depleted SOI MOS transistors at nanometer gate lengths
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
10
Conference Proceedings
Optimization of mask absorber stacks and illumination settings for contact hole imaging
Society of Photo-optical Instrumentation Engineers |
5
Conference Proceedings
The impact of the mask stack and its optical parameters on the imaging performance
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
Do we need complex resist models for predictive simulation of lithographic process performance?
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Rigorous simulation of lithographic exposure of photoresist over a nonplanar wafer
SPIE - The International Society of Optical Engineering |