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Effects of laser bandwidth on tool to tool CD matching

Author(s):
  • B.-Y. Hsueh ( United Microelectronics Corp., Taiwan )
  • H.-Y. Wu ( United Microelectronics Corp., Taiwan )
  • L. Jang ( United Microelectronics Corp., Taiwan )
  • M. Yeh ( United Microelectronics Corp., Taiwan )
  • C.-C. Yang ( United Microelectronics Corp., Taiwan )
Publication title:
Optical Microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6924
Pub. Year:
2008
Vol.:
3
Page(from):
69244K-1
Page(to):
69244K-15
Pages:
15
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471093 [0819471097]
Language:
English
Call no.:
P63600/6924
Type:
Conference Proceedings

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