Blank Cover Image

90nm node contact hole patterning through applying model based OPC in KrF lithography

Author(s):
  • Y.-D. Jeon ( Dongbu HiTek, South Korea )
  • S.-U. Lee ( Dongbu HiTek, South Korea )
  • J. Choi ( Dongbu HiTek, South Korea )
  • J. Kim ( Dongbu HiTek, South Korea )
  • J. Han ( Dongbu HiTek, South Korea )
Publication title:
Optical Microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6924
Pub. date:
2008
Vol.:
2
Page(from):
69242W-1
Page(to):
69242W-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471093 [0819471097]
Language:
English
Call no.:
P63600/6924
Type:
Conference Proceedings

Similar Items:

Kim, S.-W., Lee, S.-W., Park, C.-M., Choi, S.-H., Lee, Y.-M., Kang, Y., Yeo, G.-S., Lee, J.-H., Cho, H.-K., Han, W.-S.

SPIE - The International Society of Optical Engineering

E. Jeong, J. Kim, K. Choi, M. Lee, D. Lee

Society of Photo-optical Instrumentation Engineers

G. Yoon, H. Kim, J. Lee, S. Choi, W. Han

SPIE - The International Society of Optical Engineering

S. Jun, J. Kim, E. Jeong, Y. Yun, K. Kim

SPIE - The International Society of Optical Engineering

Kim, H., Ahn, Y. B., Kim, J., Kim, S., Park, D., Kim, Y. -S.

SPIE - The International Society of Optical Engineering

Park, S.J., Shim, Y.A., Kang, J.H., Choi,J Y, Yoon K H, Lee Y S, Kim K

SPIE - The International Society of Optical Engineering

S. Jun, E. Jeong, Y. Yun, K. Choi, J. Kim

Society of Photo-optical Instrumentation Engineers

Kim, S. P., Kim, S. C., Kim, H. C., Lee, S. I., Choi, Y. K., Han, O.

SPIE - The International Society of Optical Engineering

S. Shim, Y. Kim, S. Lee, S. Choi, W. Han

Society of Photo-optical Instrumentation Engineers

You, -J. T., Ko, -W. S., Moon, J., Ahn, -B. Y., Nam, -H. B., Yim, -G. D.

SPIE - The International Society of Optical Engineering

H. Lee, J. Choi, J. Kim, J.-W. Han, K.-Y. Kim

Society of Photo-optical Instrumentation Engineers

12 Conference Proceedings 100-nm node lithography with KrF?

Ferri,J.E., Tyrrell,B., Astolfi,D.K., Yost,D., Davis,P., Wheeler,B., Mallen,R., Jarmolowicz,J., Cann,S.G., Liu,H.Y., …

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12