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90nm node contact hole patterning through applying model based OPC in KrF lithography

Author(s):
  • Y.-D. Jeon ( Dongbu HiTek, South Korea )
  • S.-U. Lee ( Dongbu HiTek, South Korea )
  • J. Choi ( Dongbu HiTek, South Korea )
  • J. Kim ( Dongbu HiTek, South Korea )
  • J. Han ( Dongbu HiTek, South Korea )
Publication title:
Optical Microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6924
Pub. Year:
2008
Vol.:
2
Page(from):
69242W-1
Page(to):
69242W-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471093 [0819471097]
Language:
English
Call no.:
P63600/6924
Type:
Conference Proceedings

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