Influence of shot noise on CDU with DUV, EUV, and E-beam

Influence of shot noise on CDU with DUV, EUV, and E-beam

Author(s):

Z.-Y. Pan ( Taiwan Semiconductor Manufacturing Co., Taiwan )
C.-K. Chen ( Taiwan Semiconductor Manufacturing Co., Taiwan )
T.-S. Gau ( Taiwan Semiconductor Manufacturing Co., Taiwan )
B. J. Lin ( Taiwan Semiconductor Manufacturing Co., Taiwan )

Publication title:

Optical Microlithography XXI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6924

Pub. Year:

2008

Vol.:

1

Page(from):

69241K-1

Page(to):

69241K-8

Pages:

8

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819471093 [0819471097]

Language:

English

Call no.:

P63600/6924

Type:

Conference Proceedings

Details

TDL ID:	ZA00052555
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical Microlithography
Conf. info. (Number):	2008 : 21st
Conf. info. (Venue):	San Jose, California, USA
Conf. info. (Date):	2008.02.26-2008.02.29
Note for article:	Optical Microlithography XXI, 26-29 February 2008, San Jose, California, USA. Session 12. Process II, 69241K, 6924-55

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