Blank Cover Image

Robust PPC and DFM methodology for exposure tool variations

Author(s):
  • T. Kotani ( Toshiba Corp., Semiconductor Co., Japan )
  • F. Nakajima ( Toshiba Corp., Semiconductor Co., Japan )
  • H. Mashita ( Toshiba Corp., Semiconductor Co., Japan )
  • K. Sato ( Toshiba Corp., Semiconductor Co., Japan )
  • S. Tanaka ( Toshiba Corp., Semiconductor Co., Japan )
Publication title:
Optical Microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6924
Pub. Year:
2008
Vol.:
1
Page(from):
69241F-1
Page(to):
69241F-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471093 [0819471097]
Language:
English
Call no.:
P63600/6924
Type:
Conference Proceedings

Similar Items:

H. Mashita, T. Kotani, F. Nakajima, H. Mukai, K. Sato

Society of Photo-optical Instrumentation Engineers

Hashimoto, K., Fujise, H., Nojima, S., Ito, T., Ikeda, T.

SPIE - The International Society of Optical Engineering

Kotani, T., Ichikawa, H., Urakami, T., Nojima, S., Kobayashi, S., Oikawa, Y., Tanaka, S., Ikeuchi, A., Suzuki, K., …

SPIE-The International Society for Optical Engineering

8 Conference Proceedings Nikon F2 exposure tool development

Owa, S., Matsumoto, Y., Ohmura, Y., Sakuma, S., Aoki, T., Nishikawa, J., Nagasaka, H., Mizutani, T., Shiraishi, N., …

SPIE-The International Society for Optical Engineering

Kotani, T., Tanaka, S., Nojima, S., Hashimoto, K., Inoue, S., Mori, I.

SPIE - The International Society of Optical Engineering

Park, C.-H., Rhie, S.-U., Chio, S.-H., Kim, D.-H., Park, J.-S., Kim, Y.-H., Yoo, M.-H., Kong, J.-T.

SPIE-The International Society for Optical Engineering

S. Yamaguchi, E. Yamanaka, H. Mukai, T. Kotani, H. Mashita

Society of Photo-optical Instrumentation Engineers

K. Tawarayama, S. Magoshi, H. Aoyama, Y. Tanaka, S. Shirai

Society of Photo-optical Instrumentation Engineers

K. Otsubo, S. Yamaguchi, Y. Arisawa, H. Mukai, T. Kotani, H. Mashita, H. Hashimoto, T. Kamo, T. Tsutsui, O. Ikenaga

SPIE - The International Society of Optical Engineering

Sato, E., Tanaka, E., Mori, H., Kawai, T., Ito, F., Ichimaru, T., Sato, S., Takayama, K., Ido, H.

SPIE - The International Society of Optical Engineering

Gabor,A.H., Brunner,T.A., Chen,J., Chen,N., Deshpande,S., Ferguson,R.A., Horak,D.V., Holmes,S.J., Liebmann,L.W., …

SPIE-The International Society for Optical Engineering

Nakamura, H., Onishi, Y., Sato, K., Tanaka, S., Mimotogi, S., Hashimoto, K., Inoue, S.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12