Advanced resist process enabling implementation of CD controllability for 32 nm and beyond
- Author(s):
- S. Shimura ( Tokyo Electron Kyushu Ltd., Japan )
- F. lwao ( Tokyo Electron Kyushu Ltd., Japan )
- T. Kawasaki ( Tokyo Electron Kyushu Ltd., Japan )
- D. Shannon ( TEL Technology Ctr.,America LLC, Japan )
- Y. Tanaka ( Tokyo Electron Ltd., Japan )
- Publication title:
- Advances in resist materials and processing technology XXV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6923
- Pub. Year:
- 2008
- Vol.:
- 2
- Page(from):
- 69233C-1
- Page(to):
- 69233C-6
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819471086 [0819471089]
- Language:
- English
- Call no.:
- P63600/6923
- Type:
- Conference Proceedings
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