Silicon-based anti-reflective spin-on hardmask materials for 45 nm pattern of immersion ArF lithography
- Author(s):
- S. K. Kim ( Samsung Cheil Industries Inc., South Korea )
- H. M. Cho ( Samsung Cheil Industries Inc., South Korea )
- S. R. Koh ( Samsung Cheil Industries Inc., South Korea )
- M. Kim ( Samsung Cheil Industries Inc., South Korea )
- H. C. Yoon ( Samsung Cheil Industries Inc., South Korea )
- Publication title:
- Advances in resist materials and processing technology XXV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6923
- Pub. Year:
- 2008
- Vol.:
- 2
- Page(from):
- 69232Q-1
- Page(to):
- 69232Q-8
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819471086 [0819471089]
- Language:
- English
- Call no.:
- P63600/6923
- Type:
- Conference Proceedings
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