Blank Cover Image

Industrial characterization of scatterometry for advanced APC of 65 nm CMOS logic gate patterning

Author(s):
Publication title:
Metrology, inspection, and process control for microlithography XXII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6922
Pub. Year:
2008
Vol.:
1
Page(from):
69220W-1
Page(to):
69220W-12
Pages:
12
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471079 [0819471070]
Language:
English
Call no.:
P63600/6922
Type:
Conference Proceedings

Similar Items:

B. Le Gratiet, P. Gouraud, E. Aparicio, L. Babaud, K. Dabertrand

Society of Photo-optical Instrumentation Engineers

Jean-Damien Chapon, Catherine Chaton, Pascal Gouraud, Marcel Broekaart, Scott Warrick, Isabelle Guilmeau, Yorick …

SPIE - The International Society of Optical Engineering

Pain, L., Charpin, M., Laplanche, Y., Herisson, D., Todeschini, J., Palla, R., Beverina, A., Leininger, H., Tourniol, …

SPIE-The International Society for Optical Engineering

Ke, C.-M., Yu, S.-S., Wang, Y.-H., Chou, Y.-J., Chen, J.-H., Lee, B.-H., Chu, H.-Y., Lin, H.-T., Gau, T.-S., Lin, C.-H., …

SPIE - The International Society of Optical Engineering

KiTTL, J. A. 1, PAWLAK, M. A., LAUWERS, A., SCHRAM, T., POURTOIS, G., VELOSO, A., Yu, H., HOFFMANN, T., DEMEURISSE, C., …

Electrochemical Society

Liu,H.Y., Diaz,C.H., Chi,C., Kavari,R., Cheng,P., Cao,M., Gleason,R.E., Doyle,B.S., Greene,W., Ray,G.

SPIE-The International Society for Optical Engineering

M. Hopstaken, M. Juhel, J. Gonchond, L. Kwakman, C. Wyon

Electrochemical Society

Hsu, S.-H., Fang, S.-P., Huang, I.H., Lin, B.S., Hung, K.-C.

SPIE - The International Society of Optical Engineering

Claude Ortolland, Pierre Morin, Franck Arnaud, Stephane Orain, Chandra Reddy, Catherine Chaton, Peter Stolk

Materials Research Society

Lai, C.-M., Ho, J.-S., Lai, C.-W., Tsai, C.-K., Tsay, C.-S., Chen, J.-H., Liu, R.-G., Ku, Y.C., Lin, B.-J.

SPIE - The International Society of Optical Engineering

E. B. Maiken

SPIE - The International Society of Optical Engineering

Gambino, J., Bandy, K., Chapple-Sokol, J., Conti, R., Dobuzinsky, D., Iggulden, R., Maldei, M., Peterson, K., Rupp, T., …

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12