Blank Cover Image

Accurate and traceable dimensional metrology with a reference CD-SEM

Author(s):
  • A. E. Vladár ( National Institute of Standards and Technology, USA )
  • J. S. Villarrubia ( National Institute of Standards and Technology, USA )
  • P. Cizmar ( National Institute of Standards and Technology, USA )
  • M. Oral ( National Institute of Standards and Technology, USA )
  • M. T. Postek ( National Institute of Standards and Technology, USA )
Publication title:
Metrology, inspection, and process control for microlithography XXII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6922
Pub. date:
2008
Vol.:
1
Page(from):
69220H-1
Page(to):
69220H-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471079 [0819471070]
Language:
English
Call no.:
P63600/6922
Type:
Conference Proceedings

Similar Items:

Villarrubia, J.S., Vladar, A.E., Postek, M.T.

SPIE-The International Society for Optical Engineering

Postek, M.T., Vladar, A.E., Rice, T.M., Knowles, R.

SPIE-The International Society for Optical Engineering

A. E. Vladár, K. P. Purushotham, M. T. Postek

Society of Photo-optical Instrumentation Engineers

Lowney,J.R., Vladar,A.E., Postek,M.T.

SPIE-The International Society for Optical Engineering

Vladar, A.E., Villarrubia, J.S., Postek, M.T.

SPIE-The International Society for Optical Engineering

M. T. Postek, A. E. Vladár

Society of Photo-optical Instrumentation Engineers

Villarrubia, J.S., Vladar, A.E., Bunday, B.D., Bishop, M.

SPIE - The International Society of Optical Engineering

Bunday, B.D., Bishop, M., McCormack, D.W., Jr., Villarrubia, J.S., Vladar, A.E., Dixson, R., Vorburger, T.V., Orji, …

SPIE - The International Society of Optical Engineering

Postek,M.T., Vladar,A.E., Villarrubia,J.S.

SPIE - The International Society for Optical Engineering

Villarrubia,J.S., Vladar,A.E., Lowney,J.R., Postek Jr.,M.T.

SPIE-The International Society for Optical Engineering

Vladar, A. E., Radi, Z., Postek, M. T., Kavuri, P. P.

SPIE - The International Society of Optical Engineering

Villarrubia, J.S., Vladar, A.E., Lowney, J.R., Postek, M.T., Jr.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12