The study of attenuated PSM structure for extreme ultraviolet lithography with minimized mask shadowing effect
- Author(s):
- C. Y. Jeong ( Hanyang Univ., South Korea )
- B. H. Kim ( Hanyang Univ., South Korea )
- T. G. Kim ( Hanyang Univ., South Korea )
- S. Lee ( Hanyang Univ., South Korea )
- E. J. Kim ( Hanyang Univ., South Korea )
- Publication title:
- Emerging lithographic technologies XII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6921
- Pub. Year:
- 2008
- Vol.:
- 2
- Page(from):
- 69213Q-1
- Page(to):
- 69213Q-8
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819471062 [0819471062]
- Language:
- English
- Call no.:
- P63600/6921
- Type:
- Conference Proceedings
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