Blank Cover Image

Process flow innovations for photonic device integration in CMOS

Author(s):
  • M. Beals ( Massachusetts Institute of Technology, USA )
  • J. Michel ( Massachusetts Institute of Technology, USA )
  • J. F. Liu ( Massachusetts Institute of Technology, USA )
  • D. H. Ahn ( Massachusetts Institute of Technology, USA )
  • D. Sparacin ( Massachusetts Institute of Technology, USA )
Publication title:
Silicon photonics III : 21-24 January 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6898
Pub. Year:
2008
Page(from):
689804-1
Page(to):
689804-14
Pages:
14
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470737 [0819470732]
Language:
English
Call no.:
P63600/6898
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Advances in fully CMOS integrated photonic devices

J. Michel, J. F. Liu, D. H. Ahn, D. Sparacin, R. Sun, C. Y. Hong, W. P. Giziewicz, M. Beals, L. C. Kimerling, A. Kopa, …

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Photonic crystals for optoelectronic devices

Forchel,A.W., Kamp,M., Reithmaier,J.-P., Moosburger,J., Happ,T.A., Rennon,S., Klopf,F., Werner,R., Oesterle,U., …

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Electronic-photonic integrated circuits on the CMOS platform (Invited Paper) [6125-02]

Kimerling, L C, Ahn, D, Apsel, A B, Beals, M, Carothers, D, Chen, Y.-K., Conway, T, Gill, D M, Grove, M, Hong, C.-Y., …

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Silicon photonics: applications, recent results and integration challenges as they relate to CMOS processing - an industry perspective (Invited Paper)

Cohen, O., Salib, M., Morse, M., Paniccia, M. J.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Crossover photonic switching network with CMOS/SEED smart pixel device and 2D optical fiber bundle array

Luo,F., Cao,M., Hu,Q., Wan,A., Xu,J., Deng,C., Liu,D.

SPIE - The International Society for Optical Engineering
9 Conference Proceedings Modeling of Device Characteristics as Function of Ti Salicide Rapid Thermal Processing Parameters for Deep-Sub-Micron CMOS Technologies

Kittl, J. A., Prinslow, D. A., Misium, G., Pas, M. F.

MRS - Materials Research Society
4 Conference Proceedings High Performance Ge Devices for Electronic-Photonic Integrated Circuits

J. Liu, J. Michel

Electrochemical Society
10 Conference Proceedings Contact Processes For Advanced DRAM And CMOS Logic Devices*

Gambino, J., Bandy, K., Chapple-Sokol, J., Conti, R., Dobuzinsky, D., Iggulden, R., Maldei, M., Peterson, K., Rupp, T., …

Electrochemical Society
5 Conference Proceedings Integration of photonics components in state-of-the-art CMOS technology

F. Lustenberger, D. Leipold

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings Electronic photonic integrated circuits for high speed, high resolution, analog to digital conversion (Invited Paper) [6125-03]

Kartner, F X, Akiyama, S, Barbastathis, G, Barwicz T, Byun, H, Danielson, D T, Gan, F, Grawert, F, Holzwarth, C W, Hoyt, …

SPIE - The International Society of Optical Engineering
6 Conference Proceedings INTEGRATION OF Si-MBE AND DEVICE PROCESSING

Gravesteijn, D.J., van de Walle, G.F.A., Pruijmboom, A., van Gorkum, A.A.

Materials Research Society
12 Conference Proceedings Erbium-doped silicon light-emitting devices (Invited Paper)

Chen,T.D., Agarwal,A.M., Giovane,L.M., Foresi,J.S., Liao,L., Lim,D.R., Morse,M.T., Ouellette,E.J., Ahn,S.H., Duan,X., …

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12