3D MOEMS-based optical micro-bench platform for the miniaturization of sensing devices
- Author(s):
- S. Garcia-Blanco ( INO, Canada )
- J.-S. Caron ( INO, Canada )
- S. Leclair ( INO, Canada )
- P. A. Topart ( INO, Canada )
- H. Jerominek ( INO, Canada )
- Publication title:
- MOEMS and miniaturized systems VII : 22-23 January 2008, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6887
- Pub. Year:
- 2008
- Page(from):
- 68870F-1
- Page(to):
- 68870F-9
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819470621 [0819470627]
- Language:
- English
- Call no.:
- P63600/6887
- Type:
- Conference Proceedings
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