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Development of wafer level packaged scanning micro mirrors

Author(s):
  • A. Yu ( Institute of Microelectronics, Singapore )
  • C. Lee ( Institute of Microelectronics, Singapore )
  • L. L. Yan ( Institute of Microelectronics, Singapore )
  • Q. X. Zhang ( Institute of Microelectronics, Singapore )
  • S. U. Yoon ( Institute of Microelectronics, Singapore )
Publication title:
MOEMS and miniaturized systems VII : 22-23 January 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6887
Pub. Year:
2008
Page(from):
688707-1
Page(to):
688707-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470621 [0819470627]
Language:
English
Call no.:
P63600/6887
Type:
Conference Proceedings

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