Wafer-level vacuum packaged resonant micro-scanning mirrors for compact laser projection displays

Author(s):

• U. Hofmann ( Fraunhofer Institute for Silicon Technology, Germany )
• M. Oldsen ( Fraunhofer Institute for Silicon Technology, Germany )
• H.-J. Quenzer ( Fraunhofer Institute for Silicon Technology, Germany )
• J. Janes ( Fraunhofer Institute for Silicon Technology, Germany )
• M. Heller ( Sensor Dynamics AG, Germany )

Publication title:

MOEMS and miniaturized systems VII : 22-23 January 2008, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6887

Pub. Year:

2008

Page(from):

688706-1

Page(to):

688706-15

Pages:

15

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470621 [0819470627]

Language:

English

Call no.:

P63600/6887

Type:

Conference Proceedings