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Wafer-level vacuum packaged resonant micro-scanning mirrors for compact laser projection displays

Author(s):
  • U. Hofmann ( Fraunhofer Institute for Silicon Technology, Germany )
  • M. Oldsen ( Fraunhofer Institute for Silicon Technology, Germany )
  • H.-J. Quenzer ( Fraunhofer Institute for Silicon Technology, Germany )
  • J. Janes ( Fraunhofer Institute for Silicon Technology, Germany )
  • M. Heller ( Sensor Dynamics AG, Germany )
Publication title:
MOEMS and miniaturized systems VII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6887
Pub. date:
2008
Page(from):
688706-1
Page(to):
688706-15
Pages:
15
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470621 [0819470627]
Language:
English
Call no.:
P63600/6887
Type:
Conference Proceedings

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