Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device

Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device

Author(s):

S. Pal ( Univ. of Florida, USA )
K. Jia ( Univ. of Florida, USA )
S. Maley ( Air Force Research Lab., USA )
H. Xie ( Univ. of Florida, USA )

Publication title:

MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6885

Pub. Year:

2008

Page(from):

68850B-1

Page(to):

68850B-11

Pages:

11

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470607 [0819470600]

Language:

English

Call no.:

P63600/6885

Type:

Conference Proceedings

Details

TDL ID:	ZA00052516
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MEMS/MOEMS Components and Their Applications
Conf. info. (Number):	2008 : 5th
Conf. info. (Venue):	San Jose, California, USA
Conf. info. (Date):	2008.01.21-2008.01.22
Note for article:	MEMS/MOEMS components and their applications V, 21-22 January 2008, San Jose, California, USA - Photonic Biosensing and Microoptics (68850B/6885-10)

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