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A dual-reflective electrothermal MEMS micromirror for full circumferential scanning endoscopic imaging

Author(s):
  • L. Wu ( Univ. of Florida, USA )
  • H. Xie ( Univ. of Florida, USA )
Publication title:
MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6885
Pub. Year:
2008
Page(from):
688508-1
Page(to):
688508-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470607 [0819470600]
Language:
English
Call no.:
P63600/6885
Type:
Conference Proceedings

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