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Low-temperature vacuum hermetic water-level package for uncooled microbolometer FPAs

Author(s):
Publication title:
Reliability, packaging, testing, and characterization of MEMS/MOEMS VII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6884
Pub. date:
2008
Page(from):
68840P-1
Page(to):
68840P-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470591 [0819470597]
Language:
English
Call no.:
P63600/6884
Type:
Conference Proceedings

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