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Spectroscopic ellipsometry characterization of silicon/silicon-dioxide superlattices for photoluminescence and electroluminescence

Author(s):
Publication title:
Advanced fabrication technologies for micro/nano optics and photonics : 21-23 January 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6883
Pub. Year:
2008
Page(from):
68830P-1
Page(to):
68830P-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470584 [0819470589]
Language:
English
Call no.:
P63600/6883
Type:
Conference Proceedings

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