A novel fabrication technology for anti-reflex water-level vacuum packaged microscanning mirrors
- Author(s):
- M. Oldsen ( Fraunhofer Institute for Silicon Technology, Germany )
- U. Hofmann ( Fraunhofer Institute for Silicon Technology, Germany )
- H. J. Quenzer ( Fraunhofer Institute for Silicon Technology, Germany )
- J. Janes ( Fraunhofer Institute for Silicon Technology, Germany )
- C. Stolte ( Fraunhofer Institute for Silicon Technology, Germany )
- Publication title:
- Micromachining and microfabrication process technology XIII : 22-23 January 2008, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6882
- Pub. Year:
- 2008
- Page(from):
- 688208-1
- Page(to):
- 688208-8
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819470577 [0819470570]
- Language:
- English
- Call no.:
- P63600/6882
- Type:
- Conference Proceedings
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