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A novel fabrication technology for anti-reflex water-level vacuum packaged microscanning mirrors

Author(s):
  • M. Oldsen ( Fraunhofer Institute for Silicon Technology, Germany )
  • U. Hofmann ( Fraunhofer Institute for Silicon Technology, Germany )
  • H. J. Quenzer ( Fraunhofer Institute for Silicon Technology, Germany )
  • J. Janes ( Fraunhofer Institute for Silicon Technology, Germany )
  • C. Stolte ( Fraunhofer Institute for Silicon Technology, Germany )
Publication title:
Micromachining and microfabrication process technology XIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6882
Pub. date:
2008
Page(from):
688208-1
Page(to):
688208-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470577 [0819470570]
Language:
English
Call no.:
P63600/6882
Type:
Conference Proceedings

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