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Laser direct writing of SiO2/TiO2 sol-gel films to fabricate stripe optical waveguides

Author(s):
  • X. Zeng ( Huazhong Univ. of Science and Technology, China )
  • A. Li ( Huazhong Univ. of Science and Technology, China )
  • Z. Wang ( Huazhong Univ. of Science and Technology, China )
  • J. Liu ( Huazhong Univ. of Science and Technology, China )
  • C. Wang ( Institute of Semiconductors, China )
Publication title:
Laser-based micro- and nanopackaging and assembly II : 22-24 January 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6880
Pub. Year:
2008
Page(from):
68800Q-1
Page(to):
68800Q-11
Pages:
11
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470553 [0819470554]
Language:
English
Call no.:
P63600/6880
Type:
Conference Proceedings

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