Laser microfabrication in industry - perspectives from the past, present and future

Author(s):

M. Gower ( Nanophoton Technologies, United Kingdom )  

Publication title:

Photon processing in microelectronics and photonics VII : 21-24 January 2008, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6879

Pub. Year:

2008

Pt.:

A

Page(from):

687902-1

Page(to):

687902-15

Pages:

15

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470546 [0819470546]

Language:

English

Call no.:

P63600/6879

Type:

Conference Proceedings