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Design of Si-based electro-optical modulator employed dual capacitors

Author(s):
  • X. G. Tu ( Institute of Semiconductors, China )
  • S. W. Chen ( Institute of Semiconductors, China )
  • J. Z. Yu ( Institute of Semiconductors, China )
  • Q. M. Wang ( Institute of Semiconductors, China )
Publication title:
Optoelectronic devices and integration II : 12-15 November 2007, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6838
Pub. Year:
2008
Page(from):
68381B-1
Page(to):
68381B-10
Pages:
10
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470133 [0819470139]
Language:
English
Call no.:
P63600/6838
Type:
Conference Proceedings

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