Blank Cover Image

Charge accumulation in composite dielectric layers in capacitive RF MEMS switches

Author(s):
  • L. Zhan ( Xiamen Univ., China )
  • H. San ( Xiamen Univ., China )
  • G. Li ( Xiamen Univ., China )
  • P. Xu ( Xiamen Univ., China )
  • X. Chen ( Xiamen Univ., China )
Publication title:
MEMS/MOEMS technologies and applications III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6836
Pub. date:
2008
Page(from):
68360Z-1
Page(to):
68360Z-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470119 [0819470112]
Language:
English
Call no.:
P63600/6836
Type:
Conference Proceedings

Similar Items:

G. Li, L. Zhan, H. San, P. Xu, X. Chen

Society of Photo-optical Instrumentation Engineers

Yoon,H., Sha,Y., Sharma,P.K., Vinoy,K.J., Varadan,V.K., Varadan,V.V.

SPIE-The International Society for Optical Engineering

H. San, L. Zhan, P. Xu, G. Li, X. Chen

Society of Photo-optical Instrumentation Engineers

Song, Ming Xin, Zheng, Guo Xu, Wu, Rui

Trans Tech Publications

X. Chen, U. Hanke, H. San, G. Li, L. Zhan

Society of Photo-optical Instrumentation Engineers

Yuan, X., Hwang, J. C. M., Forehand, D., Goldsmith, C. L.

SPIE - The International Society of Optical Engineering

Miao, M., Xiao, Z.Y., Wu, G.Y., Hao, Y.L., Zhang, H.X.

SPIE-The International Society for Optical Engineering

10 Conference Proceedings MEMS for vibration energy harvesting

L. Li, Y. Zhang, H. San, Y. Guo, X. Chen

Society of Photo-optical Instrumentation Engineers

Y. Zhang, L. Li, H. San, X. Chen

Society of Photo-optical Instrumentation Engineers

Guo, F., Xu, X., Li, C., Ge, Y., Yu, J., Xin, P., Zhu, R., Lai, Z., Zhu, Z., Lu, W.

SPIE - The International Society of Optical Engineering

H. San, X. Chen, P. Xu, F. Li, M. Cheng

Society of Photo-optical Instrumentation Engineers

Ziaei, A., Dean, T., Polizzi, J.-P.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12