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Actuation voltage wave-form dependence of charge accumulation in RF MEMS switches

Author(s):
  • H. San ( Xiamen Univ., China )
  • L. Zhan ( Xiamen Univ., China )
  • P. Xu ( Xiamen Univ., China )
  • G. Li ( Xiamen Univ., China )
  • X. Chen ( Xiamen Univ., China )
Publication title:
MEMS/MOEMS technologies and applications III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6836
Pub. date:
2008
Page(from):
68360K-1
Page(to):
68360K-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470119 [0819470112]
Language:
English
Call no.:
P63600/6836
Type:
Conference Proceedings

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