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Analysis of thermal stress damage in single-crystal silicon induced by 1064-nm long-pulse laser

Author(s):
  • Y. Chen ( univ. of science and Technology, china )
  • J. Lu ( univ. of science and Technology, china )
  • X. Ni ( univ. of science and Technology, china )
Publication title:
Infrared materials, devices, and applications : 12-15 November 2007, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6835
Pub. Year:
2008
Page(from):
68351X-1
Page(to):
68351X-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470102 [0819470104]
Language:
English
Call no.:
P63600/6835
Type:
Conference Proceedings

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