Analysis of thermal stress damage in single-crystal silicon induced by 1064-nm long-pulse laser
- Author(s):
- Publication title:
- Infrared materials, devices, and applications : 12-15 November 2007, Beijing, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6835
- Pub. Year:
- 2008
- Page(from):
- 68351X-1
- Page(to):
- 68351X-7
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819470102 [0819470104]
- Language:
- English
- Call no.:
- P63600/6835
- Type:
- Conference Proceedings
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