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Properties of Au/Pt/Ti contact to p-InP by rapid thermal processing

Author(s):
  • Y. Lv ( Luoyang Optoelectronic Institute, China )
  • H. Tang ( Shanghai Institute of Technical Physics, China )
  • B. Han ( Shanghai Institute of Technical Physics, China )
  • X. Wu ( Shanghai Institute of Technical Physics, China )
  • K. Zhang ( Shanghai Institute of Technical Physics, China )
Publication title:
Infrared materials, devices, and applications : 12-15 November 2007, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6835
Pub. Year:
2008
Page(from):
68350D-1
Page(to):
68350D-10
Pages:
10
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470102 [0819470104]
Language:
English
Call no.:
P63600/6835
Type:
Conference Proceedings

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