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Equipment for 2D profile measuring of aspheric microscope condenser in mass production

Author(s):
  • X. Cheng ( Tsinghua Univ., China )
  • J. Ma ( Tsinghua Univ., China )
  • Y. Zhang ( Motic China Group Co., Ltd., China )
Publication title:
Optical Design and Testing III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6834
Pub. Year:
2008
Vol.:
2
Page(from):
68343L-1
Page(to):
68343L-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470096 [0819470090]
Language:
English
Call no.:
P63600/6834
Type:
Conference Proceedings

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