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Optical fiber method for measuring small plane flatness error

Author(s):
  • S. Jin ( Beijing Institute of Machinery, China )
  • Y. Lv ( Beijing Institute of Machinery, China )
  • Q. S. Chen ( Beijing Institute of Machinery, China )
Publication title:
Optical Design and Testing III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6834
Pub. Year:
2008
Vol.:
2
Page(from):
68343J-1
Page(to):
68343J-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470096 [0819470090]
Language:
English
Call no.:
P63600/6834
Type:
Conference Proceedings

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