Simultaneous defect inspection on the surface and in the interior of bare wafers using a simple knife-edge test
- Author(s):
- Publication title:
- Optical Design and Testing III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6834
- Pub. Year:
- 2008
- Vol.:
- 1
- Page(from):
- 683417-1
- Page(to):
- 683417-5
- Pages:
- 5
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819470096 [0819470090]
- Language:
- English
- Call no.:
- P63600/6834
- Type:
- Conference Proceedings
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