Simultaneous defect inspection on the surface and in the interior of bare wafers using a simple knife-edge test

Simultaneous defect inspection on the surface and in the interior of bare wafers using a simple knife-edge test

Author(s):

J. H. Lee ( Kongju National Univ., South Korea )
Y. Kim ( Mirae Technology, South Korea )
J. Kim ( HanTech Co. Ltd., South Korea )
Y. Yoo ( Korea Institute of Machinery & Materials, South Korea )

Publication title:

Optical Design and Testing III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6834

Pub. Year:

2008

Vol.:

1

Page(from):

683417-1

Page(to):

683417-5

Pages:

5

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470096 [0819470090]

Language:

English

Call no.:

P63600/6834

Type:

Conference Proceedings

Details

TDL ID:	ZA00052465
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : Optical Design and Testing
Conf. info. (Number):	2007 : 3rd
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2007.11.12-2007.11.15
Note for article:	Optical Design and Testing III, 12-15 November 2007, Beijing, China - Session 10. Optical Measurement (683417/6834-04)

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