Phase-shifting laser diode Sagnac interferometer for surface profile measurement

Phase-shifting laser diode Sagnac interferometer for surface profile measurement

Author(s):

T. Suzuki ( Niigata Univ., Japan )
M. Shirai ( Niigata Univ., Japan )
O. Sasaki ( Niigata Univ., Japan )

Publication title:

Advanced materials and devices for sensing and imaging III : 12-14 November 2007, Beijing, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6829

Pub. Year:

2008

Page(from):

68290A-1

Page(to):

68290A-8

Pages:

8

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470041 [081947004X]

Language:

English

Call no.:

P63600/6829

Type:

Conference Proceedings

Details

TDL ID:	ZA00052460
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : Advanced Materials and Devices for Sensing and Imaging
Conf. info. (Number):	2007 : 3rd
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2007.11.12-2007.11.14
Note for article:	Advanced materials and devices for sensing and imaging III, 12-14 November 2007, Beijing, China - Session 2. Laser Interferometry and Optical Profilometry (68290A/6829-33)

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