Mechanical quality factor of microcantilevers for mass sensing applications
- Author(s):
- J. Lu ( National Institute of Advanced Industrial Science and Technology, Japan )
- T. Ikehara ( National Institute of Advanced Industrial Science and Technology, Japan )
- Y. Zhang ( National Institute of Advanced Industrial Science and Technology, Japan )
- T. Mihara ( Olympus Corp., Japan )
- R. Maeda ( National Institute of Advanced Industrial Science and Technology, Japan )
- Publication title:
- Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6800
- Pub. Year:
- 2008
- Page(from):
- 68001Y-1
- Page(to):
- 68001Y-8
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819469717 [0819469718]
- Language:
- English
- Call no.:
- P63600/6800
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Measurements of silicon dry-etching rates and profiles in MEMS foundries and their application to MEMS design software
Society of Photo-optical Instrumentation Engineers |
7
Conference Proceedings
Shape optimization of microcantilevers for mass variation detection and AFM applications
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
Novel MEMS-based thermometer with low power consumption for health-monitoring network application
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
Smart Piezoelectric PZT Microcantilevers with Inherent Sensing and Actuating Abilities for AFM and LFM
MRS - Materials Research Society |
9
Conference Proceedings
Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |