Specialized hybrid batch fabrication process for MEMS RF voltage sensors

Specialized hybrid batch fabrication process for MEMS RF voltage sensors

Author(s):

J. Dittmer ( Technische Univ. Braunschweig, Germany )
R. Judaschke ( Physikalisch-Technische Bundesanstalt, Germany )
S. Buttgenbach ( Technische Univ. Braunschweig, Germany )

Publication title:

Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6800

Pub. Year:

2008

Page(from):

68000P-1

Page(to):

68000P-9

Pages:

9

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819469717 [0819469718]

Language:

English

Call no.:

P63600/6800

Type:

Conference Proceedings

Details

TDL ID:	ZA00052431
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology
Conf. info. (Number):	2007 : 4th
Conf. info. (Venue):	Canberra, Australia
Conf. info. (Date):	2007.12.05-2007.12.07
Note for article:	Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV, 5-7 December 2007, Canberra, Australia - Session 7. MEMS II (6800-26)

Similar Items:

1 Conference Proceedings Novel fabrication process for 3D meander-shaped microcils in SU-8 dielectric and their application to linear micromotors Seidemann,V., Buttgenbach,S. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Automatic sensor system for groundwater monitoring network Ehlert,A., Buttgenbach,S. SPIE - The International Society for Optical Engineering
2 Conference Proceedings Processing Challenges in the Fabrication of Advanced MEMs Kornblit, A., Aksyuk, V. A., R Bogart, G., Bolle, C., Bower, J.E., Cirelli, R. A., Ferry, E., Fetter, L., Gasparyan, A., … Electrochemical Society	8 Conference Proceedings Genetically encoded sensors for calcium and zinc A. E. Palmer, P. Dittmer, J. E. McCombs Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings High-frequency thickness-shear mode resonators for sensor application in liquids Buttgenbach,S., Rabe,J., Zimmermann,B., Hauptmann,P.R. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Fabrication of MEMS Tonpilz Transducers Zhou, Q.F., Wang, L.-P., Gerber, G., Meyer, R. Jr.,, Tol, D. Van, Tadigadapa, S., Hughes, W.J., Trolier-McKinstry, S. Materials Research Society
4 Conference Proceedings TCAD tool for innovative MEMS and MOEMS: an all-in-one solution U. Triltsch, S. Büttgenbach Society of Photo-optical Instrumentation Engineers	10 Conference Proceedings Design and fabrication of low-loss RF MEMS switches for a broadband reflectarray Ziaei, A., Dean, T., Charrier, M., Bondavalli, P., Polizzi, J.-P., Legay, H., Pinte, B., Girard, E., Gillard, R. SPIE - The International Society of Optical Engineering
5 Conference Proceedings High-frequency rf microswitches using MEMS-integrated fabrication process Liu,A.Q., Ng,G.I., Lam,Y.L., Chew,S.T., Ting,S.K. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Design and fabrication of optical-MEMS pressure sensor arrays Dasgupta,S., Zhou,J., Wolff,J.M., Jackson,H.E., Boyd,J.T. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Specialized wavefront sensors for adaptive optics D.R. Neal, J.D. Mansell, J.K. Gruetzner, R. Morgan, M.E. Warren Society of Photo-optical Instrumentation Engineers	12 Conference Proceedings Fabrication and RF Properties of Titanium Carbide/Gold Coplanar Waveguides for RF MEMS Applications Radhakrishnan, G., Robertson, R. E., Adams, P. M., Osofsky, S. S., MacGowan, K. S. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12