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Noncontact guide system for traveling elastic steel plates: vibration control performance for different guideway shapes

Author(s):
Publication title:
ICMIT 2007, mechatronics, MEMS, and smart materials
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6794
Pub. Year:
2008
Vol.:
1
Page(from):
67941T-1
Page(to):
67941T-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819469595 [0819469599]
Language:
English
Call no.:
P63600/6794
Type:
Conference Proceedings

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