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Design of the ultraprecision stage for lithography using VCM

Author(s):
  • J.-H. Kim ( Seoul National Univ. of Technology, South Korea )
  • M.-S. Kim ( Seoul National Univ. of Technology, South Korea )
  • M.-T. Oh ( Seoul National Univ. of Technology, South Korea )
Publication title:
ICMIT 2007, mechatronics, MEMS, and smart materials
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6794
Pub. Year:
2008
Vol.:
1
Page(from):
67941P-1
Page(to):
67941P-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819469595 [0819469599]
Language:
English
Call no.:
P63600/6794
Type:
Conference Proceedings

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