OPC verification on cell level using fully rigorous mask topography simulation
- Author(s):
- V. Domnenko ( Synopsys, Inc., Russia )
- T. Klimpel ( Synopsys, Inc., Germany )
- G. Viehoever ( Synopsys, Inc., Germany )
- H. Koop ( Synopsys, Inc., Germany )
- L. S. Melvin III ( Synopsys, Inc., USA )
- Publication title:
- Photomask technology 2007
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6730
- Pub. Year:
- 2007
- Vol.:
- 3
- Page(from):
- 67304J-1
- Page(to):
- 67304J-10
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819468871 [0819468878]
- Language:
- English
- Call no.:
- P63600/6730
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
32nm half pitch node OPC process model development for three dimensional mask effects using rigorous simulation
Society of Photo-optical Instrumentation Engineers |
7
Conference Proceedings
Maintaining lithographic quality during OPC for low-k1 and MEEF processes constrained by mask dimensional rules
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
Optimizing edge topography of alternating phase-shift masks using rigorous mask modeling
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
Three dimensional mask effects in OPC process model development from first principles simulation
Society of Photo-optical Instrumentation Engineers |
11
Conference Proceedings
Increasing post OPC layout verification coverage using a full-chip simulation based verification method
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |