Pattern split rules! A feasibility study of rule based pitch decomposition for double patterning

Pattern split rules! A feasibility study of rule based pitch decomposition for double patterning

Author(s):

A. van Oosten ( ASML Netherlands B.V., Netherlands )
P. Nikolsky ( ASML Netherlands B.V., Netherlands )
J. Huckabay ( Cadence Design Systems, USA )
R. Goossens ( ASML MaskTools Inc., USA )
R. Naber ( Cadence Design Systems, USA )

Publication title:

Photomask technology 2007

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6730

Pub. Year:

2007

Vol.:

1

Page(from):

67301L-1

Page(to):

67301L-7

Pages:

7

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819468871 [0819468878]

Language:

English

Call no.:

P63600/6730

Type:

Conference Proceedings

Details

TDL ID:	ZA00052371
Series ID:	PA00000029
Conf. info. (Name):	SPIE Photomask Technology : Photomask Technology 2007
Conf. info. (Number):	2007
Conf. info. (Venue):	Monterey, California, USA
Conf. info. (Date):	2007.09.18-2007.09.21
Note for article:	Photomask technology 2007, 18-21 September 2007, Monterey, California, USA - Session 12. Extreme NA (6730-152)

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