Comprehensive review of micro/meso-scale machine tools

Author(s):

• Q. Y. Wang ( Tianjin Univ., China )
• F. Z. Fang ( Tianjin Univ., China )
• X. T. Hu ( Tianjin Univ., China )

Publication title:

Design, manufacturing, and testing of micro- and nano-optical devices and systems : 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies : 8-12 July 2007, Chengdu, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6724

Pub. Year:

2007

Page(from):

67241K-1

Page(to):

67241K-6

Pages:

6

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819468819 [0819468819]

Language:

English

Call no.:

P63600/6724

Type:

Conference Proceedings