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Design of a new MEMS-based tunable grating with electrostatic comb drive

Author(s):
  • Y. Yu ( Northwestern Polytechnical Univ., China )
  • W. Yuan ( Northwestern Polytechnical Univ., China )
  • J. Xu ( Northwestern Polytechnical Univ., China )
Publication title:
Design, manufacturing, and testing of micro- and nano-optical devices and systems : 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies : 8-12 July 2007, Chengdu, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6724
Pub. Year:
2007
Page(from):
67241G-1
Page(to):
67241G-5
Pages:
5
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468819 [0819468819]
Language:
English
Call no.:
P63600/6724
Type:
Conference Proceedings

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