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SPM interferometer with large range for mirco-vibration measurement

Author(s):
  • M. Fu ( Chongqing Univ., China )
  • C. Tang ( Chongqing Univ., China )
  • G. He ( Chongqing Univ., China )
  • J. Hu ( Chongqing Univ., China )
  • L. Wang ( Chongqing Univ., China )
Publication title:
Optical test and measurement technology and equipment
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6723
Pub. Year:
2007
Vol.:
3
Page(from):
67235V-1
Page(to):
67235V-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468802 [0819468800]
Language:
English
Call no.:
P63600/6723
Type:
Conference Proceedings

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