Application of SPM interferometry in MEMS vibration measurement

Application of SPM interferometry in MEMS vibration measurement

Author(s):

C. Tang ( Chongqing Univ., China )
G. He ( Chongqing Univ., China )
C. Xu ( Chongqing Univ. of Posts and Telecommunications, China )
L. Zhao ( Chongqing Univ., China )
J. Hu ( Chongqing Univ., China )

Publication title:

Optical test and measurement technology and equipment

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6723

Pub. Year:

2007

Vol.:

3

Page(from):

67235P-1

Page(to):

67235P-5

Pages:

5

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819468802 [0819468800]

Language:

English

Call no.:

P63600/6723

Type:

Conference Proceedings

Details

TDL ID:	ZA00052369
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Advanced Optical Manufacturing and Testing Technologies
Conf. info. (Number):	2007 : 3rd
Conf. info. (Venue):	Chengdu, China
Conf. info. (Date):	2007.07.08-2007.07.12
Note for article:	3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 8-12 July 2007, Chengdu, China - Potser session (6723-204)

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