Structural and optical properties of Al-doped ZnO films coated by RF magnetron sputtering

Structural and optical properties of Al-doped ZnO films coated by RF magnetron sputtering

Author(s):

Y.-B. Wu ( Xiamen Univ., China )
B. Huang ( Xiamen Univ., China )
L.-T. Zhang ( Xiamen Univ., China )
J. Li ( Xiamen Univ., China )
S.-T. Wu ( Xiamen Univ., China )

Publication title:

Optical test and measurement technology and equipment

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6723

Pub. Year:

2007

Vol.:

2

Page(from):

67232P-1

Page(to):

67232P-4

Pages:

4

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819468802 [0819468800]

Language:

English

Call no.:

P63600/6723

Type:

Conference Proceedings

Details

TDL ID:	ZA00052369
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Advanced Optical Manufacturing and Testing Technologies
Conf. info. (Number):	2007 : 3rd
Conf. info. (Venue):	Chengdu, China
Conf. info. (Date):	2007.07.08-2007.07.12
Note for article:	3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 8-12 July 2007, Chengdu, China - Potser session (6723-96)

Similar Items:

1 Conference Proceedings Effect of annealing temperature on the structural and optical properties of Al-doped ZnO films by RF magnetron sputtering Y. Wu, B. Huang, L. Zhang, S. Wu Society of Photo-optical Instrumentation Engineers	7 Conference Proceedings Effect of Annealing on Structural and Optical Properties of Zr Doped ZnO Film Grown by RF Magnetic Sputtering J. Wang, C.Y. Zhang, Z.G. Wu, P.X. Yan Trans Tech Publications
2 Conference Proceedings The nanostructures and optical properties of ZnO films by RF magnetron sputtering Huang, B., Wu, S., Li, J., Sun, S., Tian, Z. SPIE - The International Society of Optical Engineering	8 Conference Proceedings Optical-Electrical Properties and Corrosion Behavior of Tantalum-Doped Indium Tin Oxide Films Deposited by Magnetron Sputtering X.P. Dong, B. Zhang, J.S. Wu Trans Tech Publications
3 Conference Proceedings Effect of Substrate Temperature on the Properties of Al-Doped ZnO Films by RF Magnetron Sputtering Y.B. Wu, S. Lei, Z. Wang, R.H. Zhao, L. Huang Trans Tech Publications	9 Conference Proceedings Structure and Optical Properties of ZnO Thin Film Preparation Using RF Magnetron Sputtering S.Y. Quan, L.M. Yang, C. Liu, X.D. Zhang Trans Tech Publications
4 Conference Proceedings The structural and electrochemical properties of tin oxide films prepared by RF magnetron sputtering M. Cai, J. Song, L. Zhang, Q. Wu, S. Wu Society of Photo-optical Instrumentation Engineers	10 Conference Proceedings Structural, Optical and Magnetic Properties of Co and Fe Doped ZnO Thin Films Grown by Radio Frequency Magnetron Sputtering Luis M. Angelats, Maharaj S. Tomar, Rahul Singhal, Oscar P. Perez, Hector J. Jimenez, Ricardo Martinez Materials Research Society
5 Conference Proceedings The properties of ZnO thin films fabricated by ion beam sputtering and RF magnetron sputtering X. X. He, H. Q. Li, J. B. Gu, S. B. Wu, B. Cao Society of Photo-optical Instrumentation Engineers	11 Conference Proceedings Morphological Character and Statistical Property of Random Surface of ZnO Thin Film Prepared by RF Magnetron Sputtering N.Y. Zhang, Q.S. Huo, L.X. Han, G. Fu, J.Q. Zhao Trans Tech Publications
6 Conference Proceedings Investigation of Optical Properties of ZnO Films Deposited by RF Magnetron Sputtering S. Li, F.X. Wang, G. Fu, Y.J. Ji, J.Q. Zhao Trans Tech Publications	12 Conference Proceedings Structural and Optical Properties of SiC Films Deposited on Si by DC Magnetron Sputtering Lei, Y.M., Yu, Y.H., Cheng, L.L., Lin, L., Sundaraval, B., Luo, E.Z., Lin, S., Ren, C.X., Cheung, W.Y., Wong, S.P., Xu, … Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12