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Whole visible range imaging ellipsometry

Author(s):
  • H.-W. Wang ( Mingchi Univ. of Technology, Taiwan )
  • Y.-C. Hsieh ( Industrial Technology Research Institute, Taiwan )
  • K.-P. Chuang ( Industrial Technology Research Institute, Taiwan )
  • F.-S. Yang ( Industrial Technology Research Institute, Taiwan )
  • C. I Wu ( Industrial Technology Research Institute, Taiwan )
Publication title:
Optical test and measurement technology and equipment
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6723
Pub. date:
2007
Vol.:
1
Page(from):
67230Q-1
Page(to):
67230Q-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468802 [0819468800]
Language:
English
Call no.:
P63600/6723
Type:
Conference Proceedings

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