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High quality HfO2 thin films prepared by reactive ion beam assisted deposition

Author(s):
  • C. Wang ( Shanghai Institute of Optics and Fine Mechanics, China )
  • Y. Jin ( Shanghai Institute of Optics and Fine Mechanics, China )
  • J. Shao ( Shanghai Institute of Optics and Fine Mechanics, China )
  • Z. Fan ( Shanghai Institute of Optics and Fine Mechanics, China )
Publication title:
Advanced optical manufacturing technologies
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6722
Pub. Year:
2007
Vol.:
2
Page(from):
67223X-1
Page(to):
67223X-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468796 [0819468797]
Language:
English
Call no.:
P63600/6722
Type:
Conference Proceedings

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